High-rate low-temperature dc pulsed magnetron sputtering of photocatalytic TiO2films: the effect of repetition frequency

  • J Šícha1,

    Affiliated with

    • D Heřman1,

      Affiliated with

      • J Musil1Email author,

        Affiliated with

        • Z Strýhal2 and

          Affiliated with

          • J Pavlík2

            Affiliated with

            Nanoscale Research Letters20072:123

            DOI: 10.1007/s11671-007-9042-z

            Received: 13 December 2006

            Accepted: 25 January 2007

            Published: 27 February 2007


            The article reports on low-temperature high-rate sputtering of hydrophilic transparent TiO2thin films using dc dual magnetron (DM) sputtering in Ar + O2mixture on unheated glass substrates. The DM was operated in a bipolar asymmetric mode and was equipped with Ti(99.5) targets of 50 mm in diameter. The substrate surface temperature Tsurfmeasured by a thermostrip was less than 180 °C for all experiments. The effect of the repetition frequency frwas investigated in detail. It was found that the increase of frfrom 100 to 350 kHz leads to (a) an improvement of the efficiency of the deposition process that results in a significant increase of the deposition rate aDof sputtered TiO2films and (b) a decrease of peak pulse voltage and sustaining of the magnetron discharge at higher target power densities. It was demonstrated that several hundreds nm thick hydrophilic TiO2films can be sputtered on unheated glass substrates at aD = 80 nm/min, Tsurf < 180 °C when high value of fr = 350 kHz was used. Properties of a thin hydrophilic TiO2film deposited on a polycarbonate substrate are given.


            TiO2film Hydrophilicity Deposition rate Unheated substrate Dual magnetron sputtering Polycarbonate




            This work was supported in part by the Ministry of Education of the Czech Republic under Project No. MSM 4977751302 and in part by the Grant Agency of the Czech Republic under Project No. 106/06/0327.

            Authors’ Affiliations

            Department of Physics, University of West Bohemia
            Department of Physics, J.E. Purkyně University


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            © to the authors 2007