Investigation of cracks in GaN films grown by combined hydride and metal organic vapor-phase epitaxial method
© Liu et al; licensee Springer. 2011
Received: 23 June 2010
Accepted: 12 January 2011
Published: 12 January 2011
Cracks appeared in GaN epitaxial layers which were grown by a novel method combining metal organic vapor-phase epitaxy (MOCVD) and hydride vapor-phase epitaxy (HVPE) in one chamber. The origin of cracks in a 22-μm thick GaN film was fully investigated by high-resolution X-ray diffraction (XRD), micro-Raman spectra, and scanning electron microscopy (SEM). Many cracks under the surface were first observed by SEM after etching for 10 min. By investigating the cross section of the sample with high-resolution micro-Raman spectra, the distribution of the stress along the depth was determined. From the interface of the film/substrate to the top surface of the film, several turnings were found. A large compressive stress existed at the interface. The stress went down as the detecting area was moved up from the interface to the overlayer, and it was maintained at a large value for a long depth area. Then it went down again, and it finally increased near the top surface. The cross-section of the film was observed after cleaving and etching for 2 min. It was found that the crystal quality of the healed part was nearly the same as the uncracked region. This indicated that cracking occurred in the growth, when the tensile stress accumulated and reached the critical value. Moreover, the cracks would heal because of high lateral growth rate.
Group III nitrides are attracting much attention for short-wavelength light emitters and high-temperature electronic devices. Nitride-based devices are mostly heteroepitaxially grown on non-native substrates, such as sapphire (Al2O3), Si, GaAs, and SiC. The differences of thermal expansion coefficient (TEC) and lattice constant between GaN and foreign substrates usually induce a large residual stress in thick GaN films. Homoepitaxy is very essential to improve the crystal quality. Hydride vapor-phase epitaxy (HVPE) is a promising technique for growing thick GaN film at reasonable cost. The conventional method of growing high quality thick film needs two systems. Before depositing the thick layer by HVPE, a template has been predeposited by MOCVD . Compared with the conventional growth method, the combined hydride and metal organic vapor-phase epitaxial (MOCVD-HVPE) in one chamber has several great advantages: (1) the MOCVD and HVPE run in the same reactor without time-consuming modification or equipments replacement; (2) furthermore, the cracks and contamination introduced in the course of transfer can be voided; and (3) the growth methods can be alternated if necessary.
However, cracks are often produced in GaN thick film grown by HVPE. There are several intriguing aspects for the observed cracks of GaN on sapphire substrates. Itoh et al.  proposed that the cracks originated from the static cooling process. As the thermal expansion coefficient of GaN is smaller than that of sapphire , the film will suffer from biaxial compressive stress during cooling. Etzkorn and Clarke  also observed cracks in GaN film deposited by HVPE on SiC substrate. In our article, the cracks existing in GaN thick films were observed directly and the probable formation mechanism was proposed.
The high-resolution X-ray diffraction (D8 discover) was used to determine the lattice constant c near top surface. The curvature was also determined by this equipment, following the suggestion given by Liu et al. . D8 discover was equipped with a twofold hybrid monochromatic and a threefold Ge (220) analyzer. The crystal quality of the sample was characterized using the high-resolution X-ray diffraction apparatus at Beijing Synchrotron Radiation Facility. The micro-Raman measurements were done using JYHR800 Raman spectrum. The laser was an argon ion laser operating at 514.5 nm. The spectral frequency resolution was less than 0.2 cm-1 and the spatial resolution was less than 1 μm. The error bar is 0.2 cm-1. All micro-Raman spectra were recorded in the backscattering geometry. The spectrometer was calibrated using single-crystal silicon as a reference. The surface morphology and cracks were observed by SEM (using Hitachi S4800). The cathodoluminescence (CL) was performed in a scanning electron microscope (SEM) using Gantan mono CL system at room temperature.
Results and discussion
The lattice constant determined by XRD
Lattice constant c(nm)
E 2(high) (cm-1)
Radius of curvature (m)
The Raman scattering is a useful tool for investigating the strain of epitaxial film. The frequency of E 2 (high) phonon is very sensitive to the in-plane strain. As illustrated in Figure 5a, the frequencies of E 2 high exhibit redshift with increasing etching time, which is consistent with the variations of lattice constant c. Many articles reported that the strain-free frequency of E 2 high mode was 567.5, 567.6, and 568 cm-1[13–15]. If the frequency is larger than the value of reference, the presence of compressive stress will be expected; on the other hand, the stress will be tensile. This effect had already been observed for hydrostatic pressure, biaxial strain, and uniaxial strain . The obtained lattice constants c were larger than the reference value, so the samples suffered from compressive stress at room temperature. The variation of the stress which was calculated along depth was in agreement with the shift of E 2 (high) phonon frequency. Furthermore, this trend was consistent with the variation of the curvature. Sample Af10 had two notable features: the cracks were observed in the surface; stress rapidly dropped. We could believe that the stresses were mainly relaxed by producing cracks.
The cracks nucleation and extension are the consequences of both the existence of tensile stress and exceeding the critical thickness during the growth process. We should explain the origin of the tensile stress. Many authors observed intrinsic tensile stress using in situ measurements of wafer bending curvature [20–22]. They found that the compressive stress appeared first, and then the compressive stress switched to steady tensile stress. This tensile stress was attributed to islands coalescence. This phenomenon was independent of the substrate. Hoffman  proposed that adjacent islands with vertical surface grew closer to one another and then elastically snapped together when the gap between the islands reached some critical size. The decrease of the solid-vapor interfacial energy balances the increase of the stress-related mechanical energy and grain boundary-related surface energy. Cracks will occur once the stressed films reach the critical thickness. Once the cracks have been introduced, an opening channel would be left. However, it is difficult to explain that the cracks do not extend to the surface and many cracks are buried in the consequence growth. Etzkom and Clarke  proposed several possibilities for the cracks that get closed up and buried: film lateral growth at the crack opening; concurrent diffusion transport by surface diffusion, driven by capillarity; and cracks face touch in cooling process. However, only at high temperature the atom have high diffusing rate. In our system, the temperature dropping from 1050 to 600°C only needs 3 min. Some authors had calculated the Ga atom surface diffuse length and the value was less than 13 nm min-1 at 1050°C . A large number of Ga and N atoms concurrent diffusion along the cracks surface are very difficult. If the healed part originates from the face touch in cooling, the crystal quality would be inferior to the uncracked part. In order to compare crystal quality of the cracks edge with that of healed part, the cross was etched for 2 min at 200°C in mixed solution of H2SO4:H3PO3 (3:1). Only crack edges were etched faster than those of the healed part, as shown in the Figure 6b. It would be concluded that the lateral growth predominates in the healing process. The tensile stress was mainly relaxed by the cracks, but residual tensile stress also was present in the uncracked region . The cracking will be reproduced in the uncracked region.
When the temperature dropped from the growth temperature to the room temperature, the thermal stress mostly exerted in the healed apartment and uncracked region. These explanations are consistent with the result of Raman spectra in Figure 7b and surface stress analysis in Table 1. The variation of phonon frequency appeared as S-shaped distribution along depth; the cracks did not extend to the surface or approach the substrate; the crystal quality of healed part is comparable with the uncracked part.
The origin of cracks in GaN film grown by MOCVD-HVPE system has been analyzed by SEM, HR-XRD, Raman, and CL. The stress distribution was obtained by cross-sectional Raman spectra. According to the stress distribution and the cracks distribution, it would be expected that the cracks originate from the growth process. When the films reach the critical thickness, cracks will be generated. Then the cracks will be healed in the consequent growth by lateral growth. So the cracks do not extend to either the substrate or the film surface.
hydride vapor-phase epitaxy
metal organic vapor-phase epitaxy
- NH3 :
scanning electron microscopy
standard liters per minute
standard cubic centimeters per minute
thermal expansion coefficient
This work was supported by National Science Foundation of China (Nos. 60776015, 60976008), the Special Funds for Major State Basic Research Project (973 program) of China (No. 2006 CB604907), and the 863 High Technology R&D Program of China (Nos. 2007AA03Z402, 2007AA03Z451).
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