Effects of Sn doping on the morphology and properties of Fe-doped In2O3 epitaxial films
© Zhou et al.; licensee Springer. 2012
Received: 1 November 2012
Accepted: 19 November 2012
Published: 30 November 2012
(Sn, Fe)-codoped In2O3 epitaxial films were deposited on (111)-oriented Y-stabilized ZrO2 substrates by pulsed laser deposition with constant Fe concentration and different Sn concentrations. The influence of Sn concentration on the crystal structure and properties of Fe-doped In2O3 ferromagnetic semiconductor films has been investigated systematically. Experimental results indicate that Sn doping can effectively reduce the surface roughness and suppresses breakup of the films into separated islands. At the same time, the optical band gap increases and the electrical properties improve correspondingly. However, although the carrier density increases dramatically with the Sn doping, no obvious change of the ferromagnetism is observed. This is explained by a modified bounded magnetic polaron model.
KeywordsMagnetic semiconductor Indium oxide Morphology Epitaxial film
In the past two decades, diluted magnetic semiconductors (DMSs) have attracted considerable interests due to their novel physical properties and potential applications in spin-based devices. Many material systems of DMSs, such as ZnO, TiO2, SnO2, In2O3, GaAs, and also GeMn[2–5], have been widely studied. Among various kinds of oxide DMSs, transition metal-doped In2O3 has attracted great attention because of its excellent optical and electric properties, and its room-temperature ferromagnetism has been observed in Fe-, Co-, Ni-, and Cr-doped In2O3[6–9]. Among these elements, Fe doping is particularly interesting and has attracted lots of attention because of the high solubility (as high as 20%) of Fe ions into In2O3 lattice and the high magnetic moment of the Fe3+ ion, which makes Fe-doped In2O3 a fascinating DMS. Many research works have been conducted on Fe-doped In2O3 films, and high-temperature ferromagnetism was reported by several groups[10–12]. Spin-polarized carriers were also revealed in this material by the anomalous Hall effect (AHE). These results indicate that Fe-doped In2O3 may be a promising ferromagnetic semiconductor for future spintronic devices. However, for most device applications, smooth surfaces, high crystalline quality, and controllable optical and electrical properties are necessary. Although epitaxial Fe-doped In2O3 films with room-temperature ferromagnetism and AHE have been grown and studied extensively by now, most works were focused on studying their physical properties and very little effort has been directed toward the growth of high-quality Fe-doped In2O3 thin films with controlled surface morphology. In our previous work, a very rough surface with square-shaped columnar structures was observed in Fe-doped In2O3 epitaxial films grown on Y-stabilized ZrO2 (YSZ) (100) substrates. Similar rough island-like morphology has been observed in undoped In2O3 epitaxial films grown on YSZ (100) substrates, which is attributed to the thermodynamically preferred island (Volmer-Weber) growth mode. As we know, In2O3 is not only used as the host of DMSs, but also is the basis of the most important transparent and conductive materials in industry application. Sn-doped In2O3, so-called indium tin oxide (ITO), is widely applied in optoelectronic devices due to its high optical transparency in the visible range and high electric conductivity. Many works focused on the growth mechanism of ITO films have been reported, which showed that the surface morphology and properties of In2O3 films can be effectively improved by Sn doping[15–17]. Similarly, it should be practicable to improve the corresponding properties of Fe-doped In2O3 ferromagnetic semiconductors by doping appropriate Sn in the same way as ITO. Moreover, the carrier density of Fe-doped In2O3 films will increase with Sn doping accordingly[18, 19]. It is generally accepted that the magnetic coupling in DMS is closely related to the carrier concentration, so the Sn doping is desired to modulate the magnetic property of Fe-doped In2O3 films also. In this paper, (Sn, Fe)-codoped In2O3 epitaxial films were deposited on YSZ substrates. The effects of Sn doping on the surface morphology and the optical, electrical, and magnetic properties of Fe-doped In2O3 ferromagnetic films were studied systematically. An apparent improvement of surface morphology was observed as the Sn concentration increased. At the same time, a corresponding increase of optical band gap and carrier density was found. However, no obvious relation between the carrier density and the ferromagnetism of the films was observed, which was explained by a modified bounded magnetic polaron (BMP) model.
Growth of (Sn, Fe)-codoped In2O3 epitaxial films
Since the lattice parameter of YSZ (cubic structure, lattice parameter 2aYSZ = 10.26 Å) is similar to that of In2O3 (cubic bixbyite structure, aIn2O3 = 10.118 Å) with the lattice mismatch smaller than 1.6%, epitaxial growth of Fe-doped In2O3 films on YSZ substrates is expected. In this letter, a (111)-oriented single-crystal YSZ substrate was chosen due to the fact that the (111) surface of In2O3 has the lowest energy amongst the low-index surfaces, which is beneficial to the epitaxial growth. (Sn, Fe)-codoped In2O3 thin films were deposited by pulsed laser deposition (PLD) at a substrate temperature of 600°C. The stoichiometric targets were prepared from high-purity (99.99%) In2O3, Fe2O3, and SnO2 powders. For all the targets, the atom ratio Fe/(In + Fe + Sn) is fixed at 5%, and Sn/(In + Fe + Sn) is 0%, 1%, 3%, and 5%, respectively. The powders were mixed in a mechanical ball mill for 5 h, pressed into a 4-cm-diameter pellet, and then sintered at 1,350°C for 10 h in the air. The targets were ablated using a KrF excimer laser (COMPexPro 201, Coherent Inc., Santa Clara, CA, USA) with a pulse repetition rate of 1 Hz and an energy of 400 mJ/pulse for 5,000 pulses, which produces a film with a thickness of about 100 nm. During deposition, the pressure in the PLD chamber was maintained at high vacuum (about 4.0 × 10−5 Pa). After the deposition, the samples were cooled down naturally with the system at the same pressure.
Characterization of the (Sn, Fe)-codoped epitaxial films
The crystal structure of the (Sn, Fe)-codoped films was analyzed by X-ray diffraction (XRD; XD-3, PG Instruments Ltd., Beijing, China) and high-resolution X-ray diffraction (HRXRD; D8-Discover, Bruker Corp., Karlsruhe, Germany) with Cu Kα radiation (λ = 0.15406 nm). The surface morphology was characterized by atomic force microscopy (AFM; Solver P47 PRO, NT-MDT Co., Moscow, Russia) under contact mode. The optical transmittance was measured using an UV-visible dual-beam spectrophotometer (TU-1900, PG Instruments, Ltd., Beijing, China). The transport properties of the films were determined by Hall effect measurement in the van der Pauw four-point configuration using a SQUID magnetometer (MPMS XL-7, Quantum Design, San Diego, CA, USA). The magnetic measurements were performed using an alternating gradient magnetometer (MicroMag 2900, Princeton Measurements Corp., Princeton, NJ, USA) at room temperature.
Results and discussion
Crystal structure and surface morphology
Electronic transport properties
To explain the ferromagnetism in In1−xMn x As, Ga1−xMn x As, and Ge1−xMn x DMSs, Kaminski and Das Sarma proposed that the spontaneous magnetization arose from a percolation of BMPs. Recently, this model was also used to explain the magnetism in oxide DMSs, such as Cu- and Ag-doped ZnO films[26, 27]. In this model, the carriers localized around the oxygen defect strongly couple with the doped magnetic ions and form a BMP sphere. The distance between BMP spheres is determined by the concentration of oxygen defects. When adjacent BMP spheres are sufficiently close to each other, the spin-polarized variable-range hopping between nearby BMP spheres will happen, thus leading to a magnetic coupling between the two BMP spheres. Ferromagnetism phase will form when this sort of BMP coupling percolates throughout the entire film. Within the certain range of defect concentration, the magnetic coupling of BMP spheres increases as the distance between BMP spheres decreases, which is caused by the increase in defect concentration. It was reported that the BMP theory cannot describe the electric property accurately and the concentration of bound polarized carriers derived from the theory is much smaller than the result of the experimental Hall effect measurement. A modified BMP model has been suggested by Chou et al. to interpret and explain both the electric and magnetic properties of the oxide DMS[28, 29]. According to the modified BMP model, only carriers in localized states contribute to the magnetic coupling, while other carriers in the conduction band have no discernable effect on ferromagnetism of the samples. In our present case, although Sn doping increases carrier density significantly, the concentration of oxygen defect as the center of the BMP sphere in the films does not change a lot. In addition, the change in the radius of the BMP sphere as a result of the increase in carrier density is so small that it does not vary the number of magnetic irons which are included in the BMP sphere. Consequently, the ferromagnetism of the Fe-doped In2O3 films does not strikingly change with the increase in carrier density by Sn doping.
Epitaxial (Sn, Fe)-codoped In2O3 films with different Sn concentrations were deposited on YSZ (111) substrates by PLD. The crystal structure and surface morphology of Fe-doped In2O3 films show significant improvement by Sn doping, which is important for future spintronic device application. At the same time, the optical and electric transport properties show disciplinary changes with the Sn concentration. However, contrary to the widely accepted carrier-induced mechanism in oxide DMSs, no significant relation between the ferromagnetism of the films and the carrier density by Sn doping is observed. This result is well consistent with the modified BMP model which suggests that the magnetic coupling in oxide DMSs is mediated by the localized carriers, not the conductive carriers.
This work is supported by the State Key Research Development Program of China (2010CB833103), the National Natural Science Foundation of China (60976073, 11274201), and the Foundation for Outstanding Young Scientist in Shandong Province (BS2010CL036).
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