Broadband antireflective silicon nanostructures produced by spin-coated Ag nanoparticles
© Kim et al.; licensee Springer. 2014
Received: 11 December 2013
Accepted: 24 January 2014
Published: 1 February 2014
We report the fabrication of broadband antireflective silicon (Si) nanostructures fabricated using spin-coated silver (Ag) nanoparticles as an etch mask followed by inductively coupled plasma (ICP) etching process. This fabrication technique is a simple, fast, cost-effective, and high-throughput method, making it highly suitable for mass production. Prior to the fabrication of Si nanostructures, theoretical investigations were carried out using a rigorous coupled-wave analysis method in order to determine the effects of variations in the geometrical features of Si nanostructures to obtain antireflection over a broad wavelength range. The Ag ink ratio and ICP etching conditions, which can affect the distribution, distance between the adjacent nanostructures, and height of the resulting Si nanostructures, were carefully adjusted to determine the optimal experimental conditions for obtaining desirable Si nanostructures for practical applications. The Si nanostructures fabricated using the optimal experimental conditions showed a very low average reflectance of 8.3%, which is much lower than that of bulk Si (36.8%), as well as a very low reflectance for a wide range of incident angles and different polarizations over a broad wavelength range of 300 to 1,100 nm. These results indicate that the fabrication technique is highly beneficial to produce antireflective structures for Si-based device applications requiring low light reflection.
KeywordsSilicon nanostructures Spin-coated Ag nanoparticles Antireflection Rigorous coupled-wave analysis
Silicon (Si) is an important material used for optoelectronic device applications, such as sensors, photodetectors, and solar cells, due to its abundance in the earth's crust, low-cost, and mature fabrication technique[1–4]. For these devices, minimizing the light reflection on the surface thereby increasing the light transmission into the device is the key to increase the device performance. However, more than 30% of the incident light is lost through Fresnel reflection owing to the large refractive index difference between air (nair = 1) and Si (nSi approximately 3.8), and therefore, antireflective structures are indispensible to improve the device performance. Conventional multilayered thin-film antireflection coatings have been widely used to suppress the unwanted surface reflection losses. However, these coatings have serious drawbacks that are related to material selection, mechanical instability, and thermal mismatch. Furthermore, these antireflective coatings can suppress the reflections only over a narrow wavelength and incident angle range[5, 6]. Recently, bioinspired antireflective nanostructures with tapered features have attracted great interest for improving the performance of optical and optoelectronic devices due to their broadband and omnidirectional antireflection properties as well as long-term stability[1, 5–13]. A commonly used technique to produce such antireflective nanostructures on various materials is dry etching of nano-scale etch masks formed by electron-beam or interference lithography process[5, 6, 9, 10]. However, lithography-based nanopatterning method is not suitable for mass production because it is a time-consuming process requiring delicate and expensive equipment, reducing the cost effectiveness. Numerous research efforts have therefore been carried out to form nano-scale etch masks using a simple, fast, and cost-effective nanopatterning method in order to enhance productivity and thereby reduce the fabrication cost of antireflective nanostructures.
In this paper, we report a simplified fabrication technique for producing antireflective nanostructures having tapered profile on Si substrates without using any lithography steps. To achieve this goal, nano-scale silver (Ag) etch masks were formed using spin-coating Ag ink and subsequent sintering process. The significant advantage of the reported technique is that it requires only a low temperature and a short process duration to form the Ag etch masks[7, 11, 12]. Furthermore, the technique avoids the usage of any lithographic process, making it highly cost-effective for mass production. Prior to fabrication, the period- (i.e., distance between the adjacent nanostructures) and height-dependent reflection characteristics of the Si nanostructures were theoretically investigated using a rigorous coupled-wave analysis (RCWA) method in order to provide a guideline for producing a desirable Si nanostructure with broadband antireflection properties because the antireflection properties of these nanostructures are closely correlated with their geometry[6–12]. The Ag ink ratio and dry etching conditions, which affect the distribution, distance between adjacent nanostructures, and height of resulting Si nanostructures, were carefully adjusted, and optimal experimental conditions were found that can produce desirable antireflective Si nanostructures for practical applications. We found that the fabricated Si antireflective nanostructures have excellent antireflective properties over a wide wavelength range and polarization-independent antireflection properties.
Optical modeling of Si nanostructures
Fabrication of Si nanostructures
Results and discussion
The hemispherical reflectance spectra of the fabricated Si nanostructures for various Ag ink ratios in the wavelength range of 300 to 1100 nm are shown in Figure 3b. The hemispherical reflectance spectra were measured using a UV/VIS-NIR spectrophotometer (Cary 500, Varian, Inc., Palo Alto, CA, USA) with an integrating sphere kept at a near-normal incident angle of 8°. The reflection spectrum of bulk Si with an average reflectance of 36.8% is also included for comparison. It is evident that the Si nanostructures drastically reduced the reflection compared to that of the bulk Si over the entire wavelength range considered. The reflection minima shifts from the short-wavelength region to the long-wavelength region with an increasing Ag ink ratio (i.e., increasing the distance between adjacent Si nanostructures) as can be seen in Figure 1a[6, 8]. The Si nanostructures fabricated using an Ag ink ratio of 25%, 35%, and 50% showed an average reflectance of 6.4%, 8.5%, and 9.6%, respectively. This result indicates that controlling the Ag ink ratio is crucial to fabricate antireflective Si nanostructures having desirable antireflection properties. Although the Si nanostructures fabricated using Ag ink ratio of 25% exhibited the lowest average reflectance among the ones fabricated with three different Ag ink ratios, a 25% ink ratio resulted in the formation of too thin nanoparticles which were unable to withstand harsh etching conditions and long etching duration, as a result producing collapsed Si nanostructures. Therefore, Ag ink ratio of 35% was chosen to form Ag nanoparticles for the reminder of experiments.
We fabricated antireflective Si nanostructures by a simple nanofabrication technique using spin-coated Ag nanoparticles and a subsequent ICP etching process. Theoretical investigations based on RCWA method were carried out prior to fabrication to determine the effect of variations in height and period on the antireflection properties of Si nanostructures. Using the results from RCWA as a guideline, various Si nanostructures with different distribution, period, and height were fabricated by adjusting the Ag ink ratio and ICP etching conditions. It was found that the fabricated Si nanostructures significantly reduced the surface reflection losses compared to bulk Si over a broad wavelength range. Si nanostructures fabricated using a 35% Ag ink ratio and optimum ICP etching conditions showed excellent antireflection properties over a broad wavelength range as well as polarization- and angle-independent reflection properties. The antireflective Si nanostructures fabricated using this simple, fast, and cost-effective nanofabrication technique exhibits great potential for practical Si-based device applications where light reflection has to be minimized.
This work was supported by the National Research Foundation of Korea (NRF) grant funded by the Korea government (MEST) (no. 2011–0017606).
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