Abstract
An atomic-force microscope assisted technique is developed to control the position and size of self-assembled semiconductor quantum dots (QDs). Presently, the site precision is as good as ± 1.5 nm and the size fluctuation is within ± 5% with the minimum controllable lateral diameter of 20 nm. With the ability of producing tightly packed and differently sized QDs, sophisticated QD arrays can be controllably fabricated for the application in quantum computing. The optical quality of such site-controlled QDs is found comparable to some conventionally self-assembled semiconductor QDs. The single dot photoluminescence of site-controlled InAs/InP QDs is studied in detail, presenting the prospect to utilize them in quantum communication as precisely controlled single photon emitters working at telecommunication bands.
References
Bimberg D, Grundmann M, Ledentsov NN: Quantum Dot Heterostructures. Widley, New York; 1999.
Sakaki H: Jpn. J. Appl. Phys.. 1989, 28: L314. 10.1143/JJAP.28.L314
Takagahara T: Surf. Sci.. 1992, 267: 310. COI number [1:CAS:528:DyaK38XisVCksrw%3D] 10.1016/0039-6028(92)91144-Z
Song HZ, Akahane K, Lan S, Xu HZ, Okada Y, Kawabe M: Phys. Rev. B. 2001, 64: 085303. 10.1103/PhysRevB.64.085303
Bonadeo NH, Erland J, Gammon D, Park D, Katzer DS, Steel DG: Science. 1998, 282: 1473. COI number [1:CAS:528:DyaK1cXns1ymsro%3D] 10.1126/science.282.5393.1473
Besombes L, Baumberg JJ, Motohisa J: Phys. Rev. Lett.. 2003, 90: 257402. COI number [1:STN:280:DC%2BD3szivVGgtw%3D%3D] 10.1103/PhysRevLett.90.257402
Santori C, Fattal D, Vučković J, Solomon GS, Yamamoto Y: Nature. 2002, 419: 594. COI number [1:CAS:528:DC%2BD38Xns1Ont78%3D] 10.1038/nature01086
Yuan Z, Kardynal BE, Stevenson RM, Shields AJ, Lobo CJ, Cooper K, Beattie NS, Ritchie DA, Pepper M: Science. 2002, 295: 102. COI number [1:CAS:528:DC%2BD38XksVeruw%3D%3D] 10.1126/science.1066790
Loss D, DiVincenzo DP: Phys. Rev. A. 1998, 57: 120. COI number [1:CAS:528:DyaK1cXitlamug%3D%3D] 10.1103/PhysRevA.57.120
Ishikawa T, Nishimura T, Kohmoto S, Asakawa K: Appl. Phys. Lett.. 2000, 76: 167. COI number [1:CAS:528:DC%2BD3cXitFWrtg%3D%3D] 10.1063/1.125691
Lee H, Johnson JA, He MY, Speck JS, Petroff PM: Appl. Phys. Lett.. 2001, 78: 105. COI number [1:CAS:528:DC%2BD3MXmvVCm] 10.1063/1.1336554
Chithrani D, Williams RL, Lefebvre J, Poole PJ, Aers GC: Appl. Phys. Lett.. 2004, 84: 978. COI number [1:CAS:528:DC%2BD2cXhtVGms7Y%3D] 10.1063/1.1646455
H.Z. Song, T. Ohshima, Y. Okada, K. Akahane, T. Miyazawa, M. Kawabe, N. Yokoyama in Proceedings of the 26th ICPS, Edinburgh, 29 July- 2 August 2002, P.32
Keyser UF, Schumacher HW, Zeitler U, Haug RJ, Zberl K: Appl. Phys. Lett.. 2000, 76: 457. COI number [1:CAS:528:DC%2BD3cXlvVaqtQ%3D%3D] 10.1063/1.125786
Song HZ, Nakata Y, Okada Y, Miyazawa T, Ohshima T, Takatsu M, Kawabe M, Yokoyama N: Phys. E. 2004, 21: 625. COI number [1:CAS:528:DC%2BD2cXitlKjtb8%3D] 10.1016/j.physe.2003.11.092
Song HZ, Usuki T, Hirose S, Takemoto K, Nakata Y, Yokoyama N, Sakuma Y: Appl. Phys. Lett.. 2005, 86: 113118. 10.1063/1.1887826
Hirai A, Itoh KM: Physica E. 2004, 23: 248. COI number [1:CAS:528:DC%2BD2cXlvFCrtbs%3D] 10.1016/j.physe.2003.12.130
Okada Y, Iuchi Y, Kawabe M, Harris JS: J. Appl. Phys.. 2000, 88: 1136. COI number [1:CAS:528:DC%2BD3cXksV2itb8%3D] 10.1063/1.373788
Wang ZhM, Mazur YI, Seydmohamadi Sh, Salamo GJ, Kissel H: Appl. Phys. Lett.. 2005, 87: 213105. 10.1063/1.2131198
Song HZ, Lan S, Akahane K, Jang KY, Okada Y, Kawabe M: Solid State Communications. 2000, 115: 195. COI number [1:CAS:528:DC%2BD3cXkt1artLw%3D] 10.1016/S0038-1098(00)00153-8
Huffaker DL, Deppe DG: Appl. Phys. Lett.. 1998, 73: 366. COI number [1:CAS:528:DyaK1cXks12isLo%3D] 10.1063/1.121836
Ohshima T, Song HZ, Okada Y, Akahane K, Miyazawa T, Kawabe M, Yokoyama N: Phys. Stat. Sol. (c). 2003, 4: 1364. 10.1002/pssc.200303096
Ohshima T: Phy. Rev. A. 2000, 62: 062316. 10.1103/PhysRevA.62.062316
Takemoto K, Sakuma Y, Hirose S, Usuki T, Yokoyama N: Jpn. J. Appl. Phys. (part B). 2004, 43: L349. COI number [1:CAS:528:DC%2BD2cXivFaru7s%3D] 10.1143/JJAP.43.L349
Takemoto K, Sakuma Y, Hirose S, Usuki T, Yokoyama N, Miyazawa T, Takatsu M, Arakawa Y: Jpn J. Appl. Phys. (part B). 2004, 43: L993. COI number [1:CAS:528:DC%2BD2cXmtlGjtbY%3D] 10.1143/JJAP.43.L993
Panranthoen C, Bertru N, Dehaese O, LeCorre A, Loualiche S, Lambert B, Patriarche G: Appl. Phys. Lett.. 2001, 78: 1751. 10.1063/1.1356449
Raymond S, Studenikin S, Cheng SJ, Pioro-Ladrière M, Ciorga M, Poole PJ, Robertson MD: Semicond. Sci. Technol.. 2003, 18: 385. COI number [1:CAS:528:DC%2BD3sXjtl2gtLY%3D] 10.1088/0268-1242/18/4/332
Sakuma Y, Takemoto K, Hirose S, Usuki T, Yokoyama N: Physica E. 2005, 26: 81. COI number [1:CAS:528:DC%2BD2MXht1Ontrs%3D] 10.1016/j.physe.2004.08.028
Sakuma Y, Takeguchi M, Takemoto K, Hirose S, Usuki T, Yokoyama N: J. Vac. Sci. Technol. B. 2005, 23: 1741. COI number [1:CAS:528:DC%2BD2MXntFSjs7c%3D] 10.1116/1.1949216
Yokoi T, Adachi S, Sasakura H, Muto S, Song HZ, Usuki T, Hirose S: Phys. Rev. B. 2005, 71: 041307R. 10.1103/PhysRevB.71.041307
Feng W, Wang Y, Wang J, Ge WK, Huang Q, Zhou JM: Appl. Phys. Lett.. 1998, 72: 1463. COI number [1:CAS:528:DyaK1cXhsl2rs7o%3D] 10.1063/1.120593
Karlsson KF, Moskalenko ES, Holtz PO, Monemar B, Schoenfled WV, Garcia JM, Petroff PM: Appl. Phys. Lett.. 2001, 78: 2952. COI number [1:CAS:528:DC%2BD3MXjt1ejtb4%3D] 10.1063/1.1370547
Ignatiev VI, Kozin EI, Nair SV, Ren HW, Sugou S, Masumoto Y: Phys. Rev. B. 2000, 61: 15633. COI number [1:CAS:528:DC%2BD3cXktV2murY%3D] 10.1103/PhysRevB.61.15633
Pepper M: J. Phys. C. 1980, 13: L709. COI number [1:CAS:528:DyaL3MXhtVeksQ%3D%3D] 10.1088/0022-3719/13/26/004
Kimura S, Kumano H, Endo M, Suemune I, Yokoi T, Sasakura H, Adachi S, Muto S, Song HZ, Hirose S, Usuki T: Jpn. J. Appl. Phys.. 2005, 44: L793. COI number [1:CAS:528:DC%2BD2MXmvVemsbg%3D] 10.1143/JJAP.44.L793
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
Open Access This article is distributed under the terms of the Creative Commons Attribution 2.0 International License ( https://creativecommons.org/licenses/by/2.0 ), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
About this article
Cite this article
Song, H., Usuki, T., Ohshima, T. et al. Site-controlled quantum dots fabricated using an atomic-force microscope assisted technique. Nanoscale Res Lett 1, 160 (2006). https://doi.org/10.1007/s11671-006-9012-x
Published:
DOI: https://doi.org/10.1007/s11671-006-9012-x