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Site-controlled quantum dots fabricated using an atomic-force microscope assisted technique

Abstract

An atomic-force microscope assisted technique is developed to control the position and size of self-assembled semiconductor quantum dots (QDs). Presently, the site precision is as good as ± 1.5 nm and the size fluctuation is within ± 5% with the minimum controllable lateral diameter of 20 nm. With the ability of producing tightly packed and differently sized QDs, sophisticated QD arrays can be controllably fabricated for the application in quantum computing. The optical quality of such site-controlled QDs is found comparable to some conventionally self-assembled semiconductor QDs. The single dot photoluminescence of site-controlled InAs/InP QDs is studied in detail, presenting the prospect to utilize them in quantum communication as precisely controlled single photon emitters working at telecommunication bands.

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References

  1. 1.

    Bimberg D, Grundmann M, Ledentsov NN: Quantum Dot Heterostructures. Widley, New York; 1999.

    Google Scholar 

  2. 2.

    Sakaki H: Jpn. J. Appl. Phys.. 1989, 28: L314. 10.1143/JJAP.28.L314

    Article  Google Scholar 

  3. 3.

    Takagahara T: Surf. Sci.. 1992, 267: 310. COI number [1:CAS:528:DyaK38XisVCksrw%3D] 10.1016/0039-6028(92)91144-Z

    Article  Google Scholar 

  4. 4.

    Song HZ, Akahane K, Lan S, Xu HZ, Okada Y, Kawabe M: Phys. Rev. B. 2001, 64: 085303. 10.1103/PhysRevB.64.085303

    Article  Google Scholar 

  5. 5.

    Bonadeo NH, Erland J, Gammon D, Park D, Katzer DS, Steel DG: Science. 1998, 282: 1473. COI number [1:CAS:528:DyaK1cXns1ymsro%3D] 10.1126/science.282.5393.1473

    Article  Google Scholar 

  6. 6.

    Besombes L, Baumberg JJ, Motohisa J: Phys. Rev. Lett.. 2003, 90: 257402. COI number [1:STN:280:DC%2BD3szivVGgtw%3D%3D] 10.1103/PhysRevLett.90.257402

    Article  Google Scholar 

  7. 7.

    Santori C, Fattal D, Vučković J, Solomon GS, Yamamoto Y: Nature. 2002, 419: 594. COI number [1:CAS:528:DC%2BD38Xns1Ont78%3D] 10.1038/nature01086

    Article  Google Scholar 

  8. 8.

    Yuan Z, Kardynal BE, Stevenson RM, Shields AJ, Lobo CJ, Cooper K, Beattie NS, Ritchie DA, Pepper M: Science. 2002, 295: 102. COI number [1:CAS:528:DC%2BD38XksVeruw%3D%3D] 10.1126/science.1066790

    Article  Google Scholar 

  9. 9.

    Loss D, DiVincenzo DP: Phys. Rev. A. 1998, 57: 120. COI number [1:CAS:528:DyaK1cXitlamug%3D%3D] 10.1103/PhysRevA.57.120

    Article  Google Scholar 

  10. 10.

    Ishikawa T, Nishimura T, Kohmoto S, Asakawa K: Appl. Phys. Lett.. 2000, 76: 167. COI number [1:CAS:528:DC%2BD3cXitFWrtg%3D%3D] 10.1063/1.125691

    Article  Google Scholar 

  11. 11.

    Lee H, Johnson JA, He MY, Speck JS, Petroff PM: Appl. Phys. Lett.. 2001, 78: 105. COI number [1:CAS:528:DC%2BD3MXmvVCm] 10.1063/1.1336554

    Article  Google Scholar 

  12. 12.

    Chithrani D, Williams RL, Lefebvre J, Poole PJ, Aers GC: Appl. Phys. Lett.. 2004, 84: 978. COI number [1:CAS:528:DC%2BD2cXhtVGms7Y%3D] 10.1063/1.1646455

    Article  Google Scholar 

  13. 13.

    H.Z. Song, T. Ohshima, Y. Okada, K. Akahane, T. Miyazawa, M. Kawabe, N. Yokoyama in Proceedings of the 26th ICPS, Edinburgh, 29 July- 2 August 2002, P.32

  14. 14.

    Keyser UF, Schumacher HW, Zeitler U, Haug RJ, Zberl K: Appl. Phys. Lett.. 2000, 76: 457. COI number [1:CAS:528:DC%2BD3cXlvVaqtQ%3D%3D] 10.1063/1.125786

    Article  Google Scholar 

  15. 15.

    Song HZ, Nakata Y, Okada Y, Miyazawa T, Ohshima T, Takatsu M, Kawabe M, Yokoyama N: Phys. E. 2004, 21: 625. COI number [1:CAS:528:DC%2BD2cXitlKjtb8%3D] 10.1016/j.physe.2003.11.092

    Article  Google Scholar 

  16. 16.

    Song HZ, Usuki T, Hirose S, Takemoto K, Nakata Y, Yokoyama N, Sakuma Y: Appl. Phys. Lett.. 2005, 86: 113118. 10.1063/1.1887826

    Article  Google Scholar 

  17. 17.

    Hirai A, Itoh KM: Physica E. 2004, 23: 248. COI number [1:CAS:528:DC%2BD2cXlvFCrtbs%3D] 10.1016/j.physe.2003.12.130

    Article  Google Scholar 

  18. 18.

    Okada Y, Iuchi Y, Kawabe M, Harris JS: J. Appl. Phys.. 2000, 88: 1136. COI number [1:CAS:528:DC%2BD3cXksV2itb8%3D] 10.1063/1.373788

    Article  Google Scholar 

  19. 19.

    Wang ZhM, Mazur YI, Seydmohamadi Sh, Salamo GJ, Kissel H: Appl. Phys. Lett.. 2005, 87: 213105. 10.1063/1.2131198

    Article  Google Scholar 

  20. 20.

    Song HZ, Lan S, Akahane K, Jang KY, Okada Y, Kawabe M: Solid State Communications. 2000, 115: 195. COI number [1:CAS:528:DC%2BD3cXkt1artLw%3D] 10.1016/S0038-1098(00)00153-8

    Article  Google Scholar 

  21. 21.

    Huffaker DL, Deppe DG: Appl. Phys. Lett.. 1998, 73: 366. COI number [1:CAS:528:DyaK1cXks12isLo%3D] 10.1063/1.121836

    Article  Google Scholar 

  22. 22.

    Ohshima T, Song HZ, Okada Y, Akahane K, Miyazawa T, Kawabe M, Yokoyama N: Phys. Stat. Sol. (c). 2003, 4: 1364. 10.1002/pssc.200303096

    Article  Google Scholar 

  23. 23.

    Ohshima T: Phy. Rev. A. 2000, 62: 062316. 10.1103/PhysRevA.62.062316

    Article  Google Scholar 

  24. 24.

    Takemoto K, Sakuma Y, Hirose S, Usuki T, Yokoyama N: Jpn. J. Appl. Phys. (part B). 2004, 43: L349. COI number [1:CAS:528:DC%2BD2cXivFaru7s%3D] 10.1143/JJAP.43.L349

    Article  Google Scholar 

  25. 25.

    Takemoto K, Sakuma Y, Hirose S, Usuki T, Yokoyama N, Miyazawa T, Takatsu M, Arakawa Y: Jpn J. Appl. Phys. (part B). 2004, 43: L993. COI number [1:CAS:528:DC%2BD2cXmtlGjtbY%3D] 10.1143/JJAP.43.L993

    Article  Google Scholar 

  26. 26.

    Panranthoen C, Bertru N, Dehaese O, LeCorre A, Loualiche S, Lambert B, Patriarche G: Appl. Phys. Lett.. 2001, 78: 1751. 10.1063/1.1356449

    Article  Google Scholar 

  27. 27.

    Raymond S, Studenikin S, Cheng SJ, Pioro-Ladrière M, Ciorga M, Poole PJ, Robertson MD: Semicond. Sci. Technol.. 2003, 18: 385. COI number [1:CAS:528:DC%2BD3sXjtl2gtLY%3D] 10.1088/0268-1242/18/4/332

    Article  Google Scholar 

  28. 28.

    Sakuma Y, Takemoto K, Hirose S, Usuki T, Yokoyama N: Physica E. 2005, 26: 81. COI number [1:CAS:528:DC%2BD2MXht1Ontrs%3D] 10.1016/j.physe.2004.08.028

    Article  Google Scholar 

  29. 29.

    Sakuma Y, Takeguchi M, Takemoto K, Hirose S, Usuki T, Yokoyama N: J. Vac. Sci. Technol. B. 2005, 23: 1741. COI number [1:CAS:528:DC%2BD2MXntFSjs7c%3D] 10.1116/1.1949216

    Article  Google Scholar 

  30. 30.

    Yokoi T, Adachi S, Sasakura H, Muto S, Song HZ, Usuki T, Hirose S: Phys. Rev. B. 2005, 71: 041307R. 10.1103/PhysRevB.71.041307

    Article  Google Scholar 

  31. 31.

    Feng W, Wang Y, Wang J, Ge WK, Huang Q, Zhou JM: Appl. Phys. Lett.. 1998, 72: 1463. COI number [1:CAS:528:DyaK1cXhsl2rs7o%3D] 10.1063/1.120593

    Article  Google Scholar 

  32. 32.

    Karlsson KF, Moskalenko ES, Holtz PO, Monemar B, Schoenfled WV, Garcia JM, Petroff PM: Appl. Phys. Lett.. 2001, 78: 2952. COI number [1:CAS:528:DC%2BD3MXjt1ejtb4%3D] 10.1063/1.1370547

    Article  Google Scholar 

  33. 33.

    Ignatiev VI, Kozin EI, Nair SV, Ren HW, Sugou S, Masumoto Y: Phys. Rev. B. 2000, 61: 15633. COI number [1:CAS:528:DC%2BD3cXktV2murY%3D] 10.1103/PhysRevB.61.15633

    Article  Google Scholar 

  34. 34.

    Pepper M: J. Phys. C. 1980, 13: L709. COI number [1:CAS:528:DyaL3MXhtVeksQ%3D%3D] 10.1088/0022-3719/13/26/004

    Article  Google Scholar 

  35. 35.

    Kimura S, Kumano H, Endo M, Suemune I, Yokoi T, Sasakura H, Adachi S, Muto S, Song HZ, Hirose S, Usuki T: Jpn. J. Appl. Phys.. 2005, 44: L793. COI number [1:CAS:528:DC%2BD2MXmvVemsbg%3D] 10.1143/JJAP.44.L793

    Article  Google Scholar 

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Correspondence to HZ Song.

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Song, H., Usuki, T., Ohshima, T. et al. Site-controlled quantum dots fabricated using an atomic-force microscope assisted technique. Nanoscale Res Lett 1, 160 (2006). https://doi.org/10.1007/s11671-006-9012-x

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Keywords

  • Quantum dot
  • Site-Control
  • Atomic-force microscope
  • Local oxidation
  • Quantum computer
  • Quantum communication