Figure 26
From: Strategies for Controlled Placement of Nanoscale Building Blocks
Control of focusing with an increase of N2 ion flow rate on a substrate with 230-nm-wide and 135-nm-thick PMMA patterns. Scale bars: 100 nm. (A) Particle deposition with no ion injection. (B, D) Particle deposition with ion injection: 3 L/min (ion concentration: ∼3.31 × 105 cm−3), 4 L/min (ion concentration: ∼4.73 × 105 cm−3), and 6 L/min (ion concentration: ∼6.13 × 105 cm−3) for (B), (C), and (D), respectively. For all, an aerosol of 10 nm Ag nanoparticles was used. (Reprinted with permission from Reference [208]. Copyright 2006 Macmillan Publishers Ltd.)