Figure 1From: Mechanical Deformation Induced in Si and GaN Under Berkovich NanoindentationLoad-displacement data for single-crystal Si(100) obtained during nanoindentation with a Berkovich indenter showing two “pop-in” events during loading and, one “pop-out” event during unloading. And, the inset is a SEM micrograph showing the indentation at an applied load of 200 mNBack to article page