Figure 2From: Mechanical Deformation Induced in Si and GaN Under Berkovich NanoindentationRaman spectra taken from the Berkovich indentation of single-crystal Si(100) at the corner, the center and near edge of indent. Because of the nanoindentation-induced phase transformations, there are crystalline metastable phases present. (The symbols ■ and ○ are denoted as Si-III and Si-XII phases)Back to article page