Figure 9From: Two-Functional Direct Current Sputtered Silver-Containing Titanium Dioxide Thin Filmsa MicrohardnessH and effective Young’s modulusE*andb ratioH3/E2of ~950 nm thick Ti–Ag–O films as a function of partial pressure of oxygen . Deposition conditions:ID = 2 A,US = Ufl,ds–t = 120 mmBack to article page