Table 2 Deposition rateaD, thicknessh, WDCA after UV irradiation and optical band gapEgof thin (~500 nm) and thick (~1,500 nm) TiO2films reactively sputter-deposited atId = 2 A,pT = 1.5 Pa,Us = Uflon unheated glass substrate
From: Two-Functional Direct Current Sputtered Silver-Containing Titanium Dioxide Thin Films
(Pa) | Thin films | Thick films | ||||||||||
---|---|---|---|---|---|---|---|---|---|---|---|---|
h(nm) | aD(nm/min) | WDCA after UV irradiation | Eg(eV) | h(nm) | aD(nm/min) | WDCA after UV irradiation | Eg(eV) | |||||
20 min | 60 min | 300 min | 20 min | 60 min | 300 min | |||||||
0.3 | 700 | 6.6 | 38 | 18 | 11 | 3.21 | 1,500 | 6.3 | 18 | 11 | 8 | 3.06 |
0.7 | 700 | 5.2 | 19 | 12 | 8 | 3.19 | 1,200 | 5.8 | 10 | 9 | 9 | 3.04 |
0.9 | 600 | 4.4 | 20 | 16 | 11 | 3.11 | 1,500 | 5.2 | 8 | 9 | 8 | 2.86 |