Table 1 Average residual reflectivity calculated by the Eq. 1for measured reflectance of bare silicon, 69.1 nm silicon nitride deposited on silicon, 69.1 nm silicon nitride and 56 nm MgF2double layer deposited on silicon and 140–150 nm silicon nitride SWS fabricated on silicon
Structure | Average residual reflectivity,Rav(%) |
---|---|
Silicon | 35.61 |
Silicon nitride SLARC | 11.22 |
Silicon nitride/MgF2DLARC | 7.64 |
Silicon nitride SWS | 4.28 |