Table 1 Sample labels, obtained GIXRD results, crystalline phases, and estimated grain sizes of implanted samples
Sample type | Description | Main Bragg reflections | Mean grain size (nm) |
|---|---|---|---|
C1 | Continuum as-implanted | ZnO (110) | 26.5 |
ZnMnO3(511) | 6.7 | ||
C2 | Continuum implanted annealed | ZnO (103) | 9.0 |
ZnO (110) | 22.0 | ||
ZnMnO3(511) | 5.7 | ||
ZnMnO3(440) | 16.6 | ||
M1 | Masked as-implanted | ZnO (100) | 12.7 |
ZnO (110) | 22.5 | ||
ZnMnO3(511) | 2.5 |