Table 1 Variation of average grain size with pressure during film deposition by sputtering
From: Pd Nanoparticles and Thin Films for Room Temperature Hydrogen Sensor
Deposition pressure (m Torr) | Average grain size (nm) |
|---|---|
22 | 11 |
45 | 15 |
75 | 18 |
100 | 25 |
120 | 30 |