Figure 1From: Nanoscale Visualization of Elastic Inhomogeneities at TiN Coatings Using Ultrasonic Force Microscopy a Set-up for the UFM measurements;b Typical UFM cantilever response when a modulated ultrasonic excitation of 4 MHz with maximum amplitude Am = 8 Vppis applied to the piezo beneath the TiN sample (S-UFM mode), being the initial tip-sample set-point force (in the absence of ultrasound) of ≈70 nNBack to article page