Figure 4

TiN film obtained atW _S = 100 W:a Topography in AFM contact mode. Surface area: (5 × 5) 03BCm²;Grey-scale range: 466 nm.b UFM image simultaneously recorded with (a).c Topography in AFM contact mode recorded over the square region in (a). Surface area: (1 × 1) μm² Grey-scale range: 72 nm.d UFM image simultaneously recorded with (c), over the region squared in (b).e Topographic andf elastic profile along thelines indicated in (c) and (d), respectively