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Figure 1 | Nanoscale Research Letters

Figure 1

From: A Novel Method to Fabricate Silicon Nanowire pn Junctions by a Combination of Ion Implantation and in-situ Doping

Figure 1

The scheme of fabricating axial pn junction Si NWs—a An as-grown pi NW b scanning electron microscope (SEM) image of an as-grown pi NW. c A NW with the Au cap removed d SEM image of a NW with the Au cap removed. e P ion implantation on a NW coated with the spin-on-glass (SOG) silicon dioxide. The top intrinsic part is converted to n-type f SEM image of an SOG-coated NW. g Apn junction NW after the P ion implantation and removal of the SOG. h SEM image of a pn junction NW

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