Skip to main content
Account
Figure 2 | Nanoscale Research Letters

Figure 2

From: 3D Simulation of Nano-Imprint Lithography

Figure 2

Numerical solution showing the sequential filling of a cavity in NIL. The mold is moved with constant velocity, and the filling time is t f . The dimensionless filling time is unity e.g.,t f /λ = 1. The face coloring is a measure of internal sample pressure. Pressures are normalized with the maximum pressure recorded during the simulation.Red and blue colors indicate high- and low-pressure, areas respectively

Back to article page

Navigation