Figure 5
Comparison for the profiles of the gold nanostructures obtained by wet etching and dry etching. a shows the nanostructure after evaporating 40 nm-thick gold film 4 times at the angles of θ = 60°, 60°, 60°, 60° and φ = 0°, 90°, 180°, 270°, when the gold evaporations are non-conformal with θc = 10°. b is after 60 nm of wet etching without removing the nanosphere, c is after 30 nm of wet etching after removing the nanosphere, and d is after 60 nm of anisotropic dry etching, assuming the nanosphere and the substrate are not etched during the dry etching