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Figure 4 | Nanoscale Research Letters

Figure 4

From: Berkovich Nanoindentation on AlN Thin Films

Figure 4

Bright-field XTEM image of AlN thin film subjected to an indentation load of 50 mN. And, selected area diffraction pattern results of sample underneath the Berkovich indent from the region (I): indented AlN thin film. A close-up view of XTEM image of the deformed zone of AlN thin film, showing that several slip bands are along the ~60° pyramidal planes

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