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Figure 5 | Nanoscale Research Letters

Figure 5

From: Creation of Controlled Defects Inside Colloidal Crystal Arrays with a Focused Ion Beam

Figure 5

Nanocavities obtained by FIB drilling at 30 kV with 1 pA nominal current. Left figure: a circular pattern with SCM used to drill cavities with nominal diameters of 60, 90 and 120 nm, respectively (from right to left). Right figure: a circular pattern with serial milling with a through hole of 100 nm (left) and a circular cavity of 60 nm (right), respectively. (Ion images HFW 2.84 μm and 1.97 μm)

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