Figure 8
From: Nanogrids and Beehive-Like Nanostructures Formed by Plasma Etching the Self-Organized SiGe Islands
SEM top-view images of SiGe thin films with a 900°C annealed and 1 min Ar plasma, b 900°C annealed and 3 min Ar plasma. c 2-D and d 3-D AFM images of the self-organized nanogrids (a)