Table 1 Quantitative analysis of nanosilver islands in different zone of the deposited wafer
Spin speed (rpm) | Nanosilver concentration (wt%) | Center | Periphery | ||||
|---|---|---|---|---|---|---|---|
Ave. (nm) | SD (nm) | Coverage (%) | Ave. (nm) | SD (nm) | Coverage (%) | ||
2,000 | 3 | 69.5 | 27.0 | 36.5 | 63.3 | 19.3 | 44.9 |
5 | 79.3 | 37.1 | 51.6 | 92.4 | 52.9 | 64.0 | |
4,000 | 3 | 58.1 | 17.9 | 53.2 | 47.7 | 11.2 | 46.0 |
5 | 62.6 | 28.8 | 64.0 | 65.7 | 29.4 | 65.2 | |