Table 1 Details of the investigated samples. x In and R [hkl] were calculated from RSM peak data, and h QD and ρ QD were determined for 1 μm × 1 μm and 10 μm × 10 μm AFM images, respectively [13]. The major dislocation type was determined based on several 20 μm × 20 μm SEM pictures
From: Lateral Ordering of InAs Quantum Dots on Cross-hatch Patterned GaInP
Sample | Material | Strain | T g (°C) | X In | R [011] (%) | R [01-1] (%) | h QD (nm) | ρQD (cm−2) | Maj. Dislocation type |
|---|---|---|---|---|---|---|---|---|---|
A | GaInAs | CS | 520 | 0.142 | 1.60 | 1.40 | 13 | 5.0 × 109 | α[0–11] |
B | GaInP | CS | 520 | 0.618 | 1.50 | 1.60 | 14 | 5.1 × 109 | α[0–11] |
C | GaInP | CS | 430 | 0.617 | 1.70 | 1.60 | 13 | 5.6 × 109 | β[011] |
D | GaInP | TS | 430 | 0.354 | 2.60 | 1.90 | 16 | 4.2 × 109 | α[011] |
E | GaInP | TS | 430 | 0.34 | 0.00 | 0.00 | No QDs | No QDs | No dislocations |
F | GaInP | TS | 430 | – | – | – | No QDs | No QDs | β[0–11] |