Skip to main content


Figure 1 | Nanoscale Research Letters

Figure 1

From: Ordered Arrays of SiGe Islands from Low-Energy PECVD

Figure 1

Scanning electron micrograph (a) and AFM gradient image (b) of patterned region on (001) Si substrate. The pit diameter was 100 nm while the depth ~70 nm. We choose the coordinate axes x and y to be parallel to the images edges, which are aligned to the [110] and directions, respectively

Back to article page