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Table 1 Elastic moduli of reference samples

From: Characterization of Films with Thickness Less than 10 nm by Sensitivity-Enhanced Atomic Force Acoustic Microscopy

Reference sample Young's modulus Es(GPa) Poisson's ratio (νs) Effective Young's modulus E s * = E s / ( 1 ν s 2 ) [GPa]
Diamond (100) 1050 0.1 1061
Sapphire (0001) 451.2 0.172 465.1
Silicon (111) 187.9 0.180 194.2
Silicon (100) 130.0 0.278 140.9