Table 3 Degree of crystallization from RTA and furnace annealing in all Si concentration
Si concentration (50 to approximately 60 v%) | Si Concentration (70 v%) | Si Concentration (80 v%) | |
|---|---|---|---|
++Degree of crystallization: D RTA/D furance (from XRD) | 1 | 2.4 | 2.8 |
Degree of crystallization: D RTA/D furnace (from Raman) | 1 | 2.2 | 2.6 |