Figure 1
From: Impact of AFM-induced nano-pits in a-Si:H films on silicon crystal growth
Local topography images after. (a) the FE-MISPC process and (c) the second deposition of the same spot. Their cross sections are plotted in (b, d), respectively. (e, g) CS-AFM images corresponding to (a) and (c), respectively. Their cross sections are plotted in (f, h), respectively. Positions of the cross sections are indicated by arrows next to the images.