Figure 2From: Impact of AFM-induced nano-pits in a-Si:H films on silicon crystal growth Local morphology images after FE-MISPC resulting in non-conductive pits. (a) AFM topography; (e) CS-AFM of the same spot, and their corresponding cross sections (c, g); (b) AFM topography of the same area after the second deposition; (f) CS-AFM and the respective cross sections (d, h). The cross sections are indicated by arrows next to the AFM images.Back to article page