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Figure 1 | Nanoscale Research Letters

Figure 1

From: Atomic characterization of Si nanoclusters embedded in SiO2 by atom probe tomography

Figure 1

FIB-SEM procedure for APT sample preparation. a. Extraction of a silicon post using the Lift-out method. The sample has been milled with the help of a FIB in order to extract a strip of material. b. The strip is shaped in a post and welded onto a steel needle (platinum weld). c., d. and e. Successive annular milling steps permit to obtain a very sharp tip which curvature radius does not exceed 50nm.

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