3D reconstruction of SRSO/SiO2 MLs of APT analysis. a. Distribution of silicon atoms in the analyzed volume. Each red dot corresponds to a silicon atom. Arrows indicate the location of SRSO layers. b. Oxygen atoms. Arrows indicate the location of SiO2 layers. c. Analyzed volume after cluster identification algorithm. Each red volume corresponds to silicon rich volumes (more than 75% of silicon) and green volumes correspond to silica composition (33% of silicon).