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Figure 4 | Nanoscale Research Letters

Figure 4

From: Effect of annealing treatments on photoluminescence and charge storage mechanism in silicon-rich SiN x :H films

Figure 4

Roomtemperature PL spectra of as-deposited Si 3 N 4 /SRSN/SiO 2 films. (a) (Color online) Room temperature PL spectra of as-deposited Si3N4/SRSN/SiO2 films having an excess of silicon from 22 to 33 at.% (samples S1, S2, S3, and S4) in the middle SRSN layer, (b) PL energies and intensities of the as-deposited films as a function of silicon excess in the SRSN layer

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