Table 1 Selected samples for investigation
Sample notation | Gas flow ratio (R= NH3/SiH4) | Si atomic excess |
---|---|---|
S4 | 1.5 | 33 |
S3 | 1.64 | 29 |
S2 | 1.79 | 25 |
S1 | 1.93 | 22 |
Sample notation | Gas flow ratio (R= NH3/SiH4) | Si atomic excess |
---|---|---|
S4 | 1.5 | 33 |
S3 | 1.64 | 29 |
S2 | 1.79 | 25 |
S1 | 1.93 | 22 |