Figure 3From: Integrated sensitive on-chip ion field effect transistors based on wrinkled InGaAs nanomembranes Schematic of the microfluidic setup. (a) A processed transistor structure, including the electrodes and the wrinkled nanochannel. (b) SU-8 microchannel walls defining the microfluidic channels on the chip structure. (c) Sealing of the microchannel system by using a flexible PDMS top layer.Back to article page