Figure 5From: Anti-reflective nano- and micro-structures on 4H-SiC for photodiodes 4H-SiC photodiode structure and the optical response characteristics. (a) Structure of the 4H-SiC Schottky-type photodiode with an open area of 250 × 250 μm2. (b) Optical response of the 4H-SiC photo-diodes with different surface structures.Back to article page