Table 1 Comparison of the Schottky-type ultraviolet photodiode properties for different structures
From: Anti-reflective nano- and micro-structures on 4H-SiC for photodiodes
Structure | I dark (A) | I illumination (A) | Response (A/W) |
|---|---|---|---|
Reference cell | 1.37 × 10-11 | 5.55 × 10-8 | 75.4 |
Micro-honeycomb | 1.41 × 10-11 | 6.32 × 10-8 | 85.8 |
Nano-honeycomb | 1.94 × 10-11 | 2.18 × 10-7 | 259.5 |