Figure 3
From: Atomic scale investigation of silicon nanowires and nanoclusters
Three-dimensional reconstruction of SRSO/SiO 2 multilayer containing SiNCs. a. Distribution of silicon and b. oxygen atoms in the analyzed volume. Each dot corresponds to one atom. Silicon atoms belonging to SiNCs are artificially magnified for clarity. Arrows indicate the location of SRSO layers. c. Cross-sectional view of a SRSO layer.