From: Synthesis and characterization of VO2-based thermochromic thin films for energy-efficient windows
W- and Mo-doped films | Nb-doped films | |
---|---|---|
Base pressure (mbar) | 3 × 10-5 | 3 × 10-5 |
Work pressure (mbar) | 4 × 10-3 | 1 × 10-3 |
Oxygen/argon ratio (%) | 14.3 | 50 |
Total gas flow (sccm) | 19.2 | 6 |
DC current (A) | 0.5 | - |
Pulsed-DC current (A) | - | 0.58 |
Frequency (kHz) | - | 10 |
Reverse time (μs) | - | 5 |
Substrate temperature (°C) | 450 | 450 |
Deposition time (min) | 5 | 3 |