Figure 5

MNHS with microcavities having a hole width of 200 μm and distance between cavities of 200 μm: (a, b) acetone-mediated MNHS. The thin sidewall structure is clearly shown; (c, d) asher-mediated MNHS without any substrate rotation. The inset in (d) is a close-up image of the side region; (e, f) with 45° rotation of the substrate. The inset in (f) is a top view of laterally grown nanowires on the sides of the microcavities.