Figure 9From: CMOS-compatible dense arrays of Ge quantum dots on the Si(001) surface: hut cluster nucleation, atomic structure and array life cycle during UHV MBE growth Density and fractions of the Ge clusters of different species in the arrays formed at T gr = 360°C: (a) number density and (b) fractions; open squares mark the pyramids, black squares designate the wedges, open circles correspond to the total density of huts.Back to article page