Figure 2From: Freestanding HfO2 grating fabricated by fast atom beam etching SEM images of fabricated freestanding HfO 2 grating. (a) cross section SEM image of HfO2/Si platform; (b) a fabricated freestanding HfO2 grating; (c) and (d) zoom-in SEM images of 1040 nm period HfO2 gratings with the grating widths W t of 500 nm and 440 nm, respectively.Back to article page