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Figure 3 | Nanoscale Research Letters

Figure 3

From: Freestanding HfO2 grating fabricated by fast atom beam etching

Figure 3

SEM images of fabricated freestanding HfO 2 nanostructures. (a) SEM image of a freestanding circular HfO2 grating, the inset is the zoom-in SEM image of circular grating with the grating period of 500 nm; (b) a freestanding HfO2 photonic crystal slab on a GaN-on-silicon platform, the inset is the zoom-in SEM image of HfO2 photonic crystals with the grating period of 600 nm.

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