Figure 2
From: Thickness-dependent optimization of Er3+ light emission from silicon-rich silicon oxide thin films
Evolution of the estimated atomic percentage of agglomerated Si as a function of the film thickness. For as-deposited SRSO:Er layers deposited both at room temperature and at 500°C. The lines are guides to the eye. Inset: evolution of the refractive index and estimated increase of the compressive stress (right scale) for SiO2:Er and SRSO:Er as a function of the thickness.