Figure 4

Transmission electron microscope images, of samples deposited at 500°C for two different thicknesses. (a) 50 nm and (b) 1,400 nm. In "thin" film (a) no Si-nc was detected throughout the whole area of the sample, while in "thick" film (b) numerous well-crystallized Si-ncs are seen with diameter as high as 5 nm. The observed darker regions in (b) are accounted for Er-clusters and are observed also in some regions of "thin" films.