Figure 4
From: Formation of silicon nanodots via ion beam sputtering of ultrathin gold thin film coatings on Si
Relative concentration of gold. Relative concentration of gold in the sample during irradiation as a function of fluence after LEISS and XPS quantification. The plot of relative concentration (%Au) versus fluence displays two regions (A and B). Gold sputtering takes place in region A, whereas gold-silicon mixing and preferential sputtering of gold occurs in region B. The upper right inset is a magnification of the split between regions A and B.