Figure 5From: Fabrication of flexible UV nanoimprint mold with fluorinated polymer-coated PET film Photographic images. (a) Si master mold, (b) hot-embossed fluorinated polymer-coated flexible PET film, (c) imprinted resist patterns on flat Si substrates using hot-embossed PET film shown in b, and (d) imprinted resist patterns on curved acryl substrates using hot-embossed PET film shown in (b).Back to article page