Figure 7
From: Fabrication of flexible UV nanoimprint mold with fluorinated polymer-coated PET film
SEM micrographs of imprinted resist patterns by UV nanoimprint lithography. Using hot-embossed fluorinated polymer-coated PET film, (a, b, c) imprinted resist patterns on a flat Si substrate and (d, e, f) imprinted resist patterns on a curved acryl substrate.