Figure 8From: Fabrication of flexible UV nanoimprint mold with fluorinated polymer-coated PET film SEM micrographs of imprinted 20- to approximately 30-nm-sized patterns by UV nanoimprint lithography. Using hot-embossed fluorinated polymer-coated PET film (a) imprinted patterns on a flat Si substrate and (b) imprinted patterns on a curved acryl substrate.Back to article page