Figure 2From: Band alignment and enhanced breakdown field of simultaneously oxidized and nitrided Zr film on Si XPS valence band spectra of ZrO 2 and IL for all investigated samples. (a) XPS valence band spectra of ZrO2 and IL for all investigated samples. (b) XPS O 1s plasmon loss spectra of ZrO2 and IL for 15-min sample.Back to article page