Figure 4From: Nanopatterning on silicon surface using atomic force microscopy with diamond-like carbon (DLC)-coated Si probe Effects of the number of scratch or scan cycle. (a) The AFM images of the scratches at 10 μN of applied force and 1 μm/s of scratch speed in the forward scratch. (b) Correlation of d and W f data with numbers of scratching cycle (N o) for Si(100).Back to article page