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Table 1 AFM features (roughness and height of textured ALD-ZnO films)

From: Growth of vertically aligned ZnO nanorods using textured ZnO films

Cycles Mean roughness (nm) Mean height (nm)
400 3.2 18.18
800 5.5 19.25
1,200 8.1 20.73
1,800 12 31.41